Optical properties of ZnO deposited by atomic layer deposition (ALD) on Si nanowires
Date
2018-10-01
Authors
Graniel, Octavio
Fedorenko, Viktoriia
Viter, Roman
Iatsunskyi, Igor
Nowaczyk, Grzegorz
Weber, Matthieu
Załęski, Karol
Jurga, Stefan
Smyntyna, Valentyn
Miele, Philippe
Journal Title
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Publisher
Abstract
Description
Keywords
Research Subject Categories::NATURAL SCIENCES , Silicon nanowires (SiNWs) , metal-assisted chemical etching (MACE) , nanosphere lithography (NSL) , atomic layer deposition (ALD) , ZnO